Scientific research application

The diversity of MEMS products and manufacturing processes requires researchers to have years of practice-based expertise and know-how. Compared with the advanced integrated circuit manufacturing process (Moore's Law), MEMS manufacturing process is not simply the pursuit of line width and focus on characteristics (beyond Moore's law), to achieve a variety of sensing functions, process nodes are usually from um, 500nm to 110nm.

There is a wide range of MEMS products, such as inertial sensors, pressure sensors, MEMS microphones, RF filters, MEMS oscillators, optical MEMS, biological MEMS, etc. The diversity of varieties determines the diversity of MEMS manufacturing processes. According to the classification of substrate materials, MEMS manufacturing processes mainly include silicon and non-silicon based two categories. Silicon based MEMS manufacturing process learns from and develops semiconductor processes, mainly including bulk micro-machining, surface micro-machining and CMOS MEMS technology, which has the advantages of mass, high integration and low cost. Non-silicon-based MEMS manufacturing process involves polymer, glass, metal and other materials, mainly including stamping, injection molding, precision machining and other technologies.

For MEMS and sensor-related scientific research institutions technical personnel and project applications, or semiconductor professional college students and teachers, inSync provide related project cooperation, technical exchange and related MEMS product customization.